Radio-frequency magnetron sputter-deposited barium hexaferrite films on Pt-coated Si substrates suitable for microwave applications
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Realization of high tunability barium strontium titanate thin films by rf magnetron sputtering
Ferroelectric thin films are currently being used to develop tunable microwave circuits based on the electric-field dependence of the dielectric constant. (Ba0.5Sr0.5)TiO3 ~BST! films prepared by sputtering on Pt/TiO2 /SiO2 /Si substrates are found to exhibit a capacitance change ~tunability! of nearly 4:1. Higher tunability has been attributed to the ~100! texturing of the BST films and is a r...
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